Liabilities (Tables)

3 Months Ended

Mar. 31, 2023

Liabilities

Schedule of accrued expenses and other current liabilities

	March 31,		December 31,
	2023		2022
	(in thousands)
Payroll and related benefits	$	30,257	$	30,044
Contingent Consideration		9,606		—
Warranty		8,703		8,601
Operating lease liabilities		3,542		3,333
Interest		2,520		2,853
Professional fees		3,242		2,102
Sales, use, and other taxes		2,023		2,027
Other		9,597		7,071
Total	$	69,490	$	56,031

Schedule of changes in product warranty reserves

		(in thousands)
Balance - December 31, 2022	$	8,601
Warranties issued		1,678
Addition from Epiluvac acquisition		49
Consumption of reserves		(1,707)
Changes in estimate		82
Balance - March 31, 2023	$	8,703

Schedule of changes in deferred revenue

	(in thousands)
Balance - December 31, 2022	$	16,990
Deferral of revenue		5,392
Recognition of unearned revenue		(2,268)
Balance - March 31, 2023	$	20,114

Schedule of carrying value of Convertible Senior Notes

		March 31, 2023						December 31, 2022
		Principal Amount		Unamortized transaction costs		Net carrying value		Principal Amount		Unamortized debt discount/ transaction costs		Net carrying value
		(in thousands)
2023 Notes	$	—	$	—	$	—	$	20,173	$	(4)	$	20,169
2025 Notes		132,500		(872)		131,628		132,500		(990)		131,510
2027 Notes		125,000		(1,915)		123,085		125,000		(2,019)		122,981
Net carrying value	$	257,500	$	(2,787)	$	254,713	$	277,673	$	(3,013)	$	274,660

Schedule of interest expense related to Convertible Senior Notes

	Three months ended March 31,
	2023		2022
	(in thousands)
Cash Interest Expense
Coupon interest expense - 2023 Notes	$	23	$	136
Coupon interest expense - 2025 Notes		1,159		1,159
Coupon interest expense - 2027 Notes		1,172		1,172
Non-cash Interest Expense
Amortization of debt discount/transaction costs- 2023 Notes		4		24
Amortization of debt discount/transaction costs- 2025 Notes		117		113
Amortization of debt discount/transaction costs- 2027 Notes		105		100
Total Interest Expense	$	2,580	$	2,704