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Commitments and Contingencies - Legal Proceedings (Details)
$ in Millions
1 Months Ended
Aug. 08, 2018
case
Oct. 31, 2021
USD ($)
Apr. 30, 2022
USD ($)
Ultratech acquisition litigation      
Legal Proceedings      
Number of purported class action complaints filed | case 2    
Amount plaintiff will receive for fees and expenses     $ 0.3
Wolther Action      
Legal Proceedings      
Settlement amount   $ 15.0