Commitments and Contingencies - Minimum lease commitments (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2019	Dec. 31, 2018	Dec. 31, 2017
Minimum lease commitments, Payments due by period:
2020	$ 4,932
2021	5,020
2022	4,428
2023	1,133
2024	551
Total future minimum lease payments	16,064
Less: Imputed interest	(1,568)
Total operating lease liabilities	14,496
Operating lease liability, current	$ 4,196
Operating Lease, Liability, Current, Statement of Financial Position	veco:AccruedAndOtherLiabilitiesCurrent
Operating lease liability, noncurrent	$ 10,300
Total operating lease liabilities	$ 14,496
Operating Lease, Liability, Statement of Financial Position	veco:AccruedAndOtherLiabilitiesCurrent us-gaap:OperatingLeaseLiabilityNoncurrent
Operating lease cost	$ 5,500
Variable lease cost	1,700
Lease expense - 2019	$ 7,200
Lease expense		$ 6,300	$ 5,300