Business Combinations - Consideration (Details) - Ultratech - USD ($) $ in Thousands, shares in Millions	May 26, 2017	Dec. 31, 2017
Fair value of the consideration transferred
Cash consideration, net of cash acquired	$ 404,490
Cash acquired	229,400
Equity consideration (7.2 million shares issued)	$ 228,643
Shares issued (in shares)	7.2
Replacement equity awards attributable to pre-acquisition service	$ 228
Acquisition date fair value	$ 633,361
Accrued expenses and other current liabilities
Fair value of the consideration transferred
Cash merger consideration		$ 2,700

Number of shares of equity interests issued or issuable to acquire entity.

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Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

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Amount of equity interests of the acquirer, including instruments or interests issued or issuable in consideration for the business combination.

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Amount equity issued for the replacement of equity awards attributable to pre-acquisition service.

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