Business Combinations - Ultratech (Details) - Ultratech $ / shares in Units, $ in Thousands	May 26, 2017 USD ($) $ / shares shares
Business Combinations
Cash received by acquiree (in dollars per share) \| $ / shares	$ 21.75
Number of shares received by acquiree \| shares	0.2675
Acquisition date fair value, net of cash acquired \| $	$ 633,361

Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
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Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
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Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
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