Document Format Files
Data Files
Seq | Description | Document | Type | Size |
---|---|---|---|---|
4 | XBRL TAXONOMY EXTENSION SCHEMA | veco-20230519.xsd | EX-101.SCH | 3024 |
5 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | veco-20230519_lab.xml | EX-101.LAB | 34476 |
6 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | veco-20230519_pre.xml | EX-101.PRE | 22589 |
147 | EXTRACTED XBRL INSTANCE DOCUMENT | tm2316279d1_8k_htm.xml | XML | 3481 |
IRS No.: 112989601 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 8-K | Act: 34 | File No.: 000-16244 | Film No.: 23944420
SIC: 3559 Special Industry Machinery, NEC