EX-21.1 2 a18-1089_1ex21d1.htm EX-21.1

Exhibit 21.1

 

Subsidiaries of the Registrant

 

Subsidiary

 

Jurisdiction of Organization

 

Percentage Ownership(A)

 

 

 

 

 

 

 

U.S. Subsidiaries

 

 

 

 

 

Veeco APAC Inc.

 

DE

 

100%

 

Veeco Precision Surface Processing LLC

 

DE

 

100%

 

Veeco Process Equipment Inc.

 

DE

 

100%

 

Veeco PSP Blocker A Corp.

 

DE

 

100%

 

Ultratech Inc.

 

DE

 

100%

 

Ultratech Korea Holding, LLC.

 

DE

 

100%

 

Ultratech International, Inc.

 

DE

 

100%

 

Ultratech Stepper East, Inc.

 

DE

 

100%

 

Ultratech Corporation

 

NV

 

100%

 

 

 

 

 

 

 

Foreign Subsidiaries

 

 

 

 

 

Veeco Asia Pte. Ltd.

 

Singapore

 

100%

 

Veeco Instruments GmbH

 

Germany

 

100%

 

Veeco Instruments Limited

 

England

 

100%

 

Veeco Instruments (Shanghai) Co. Ltd.

 

China

 

100%

 

Veeco Korea LLC

 

South Korea

 

100%

 

Veeco Malaysia Sdn. Bhd.

 

Malaysia

 

100%

 

Veeco Netherlands BV

 

Netherlands

 

100%

 

Veeco Taiwan Inc.

 

Taiwan

 

100%

 

Ultratech GmbH

 

Germany

 

100%

 

Ultra-Tech Technologies Israel Ltd.

 

Israel

 

100%

 

Ultratech Kabushiki Kaisha

 

Japan

 

100%

 

Ultratech Thailand Co. Ltd.

 

Thailand

 

100%

 

Ultratech (Shanghai) Co. Ltd

 

China

 

100%

 

Ultratech Technology Holding B.V.

 

Netherlands

 

100%

 

Ultratech SE Asia PTE Ltd.

 

Singapore

 

100%

 

Ultratech Technologies Sdn Bhd

 

Malaysia

 

100%

 

 


(A) Includes direct and indirect ownership.