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Liabilities - Restructuring accruals general information (Details)
$ in Thousands
3 Months Ended 6 Months Ended
Mar. 31, 2017
USD ($)
Sep. 30, 2016
employee
Sep. 30, 2016
employee
Restructuring accruals rollforward      
Balance at the beginning of the period $ 1,796    
Provision 1,338    
Payments (1,915)    
Balance at the end of the period 1,219    
Minimum      
Restructuring accruals      
Additional restructuring costs expected over the next few quarters 2,000    
Maximum      
Restructuring accruals      
Additional restructuring costs expected over the next few quarters 4,000    
Atomic layer deposition restructuring plan      
Restructuring accruals      
Number of employees terminated | employee   25  
Personnel Severance and Related Costs      
Restructuring accruals rollforward      
Balance at the beginning of the period 1,796    
Provision 661    
Payments (1,238)    
Balance at the end of the period 1,219    
Personnel Severance and Related Costs | Streamline operations, enhance efficiency and reduce costs      
Restructuring accruals      
Number of employees terminated | employee     50
Facility Related Costs      
Restructuring accruals rollforward      
Provision 677    
Payments $ (677)