Income (Loss) Per Common Share - Shares Excluded from EPS (Details) - shares shares in Thousands	3 Months Ended		9 Months Ended
	Sep. 30, 2016	Sep. 30, 2015	Sep. 30, 2016	Sep. 30, 2015
Diluted income (loss) per share
Common share equivalents excluded from the diluted weighted average shares outstanding since Veeco incurred a net loss and their effect would be antidilutive	140		45	165
Unvested participating shares
Basic income (loss) per share
Unvested participating shares excluded from basic weighted average shares outstanding since the security holders are not obligated to fund losses	469		469	1,076
Non-participating shares
Diluted income (loss) per share
Potentially dilutive non-participating shares excluded from the diluted calculation as their effect would be antidilutive	2,030	2,264	2,042	2,066