Consolidated Statements of Cash Flows (USD $) In Thousands, unless otherwise specified	3 Months Ended
Mar. 31, 2015	Mar. 31, 2014
Cash Flows from Operating Activities
Net income (loss)	$ (19,110)	$ 19,160
Adjustments to reconcile net income (loss) to net cash provided by (used in) operating activities:
Depreciation and amortization	10,724	5,771
Deferred income taxes	607	(798)
Asset impairment	126us-gaap_AssetImpairmentCharges
Share-based compensation expense	3,998us-gaap_ShareBasedCompensation	4,722us-gaap_ShareBasedCompensation
Gain on sale of lab tools	(12)us-gaap_GainLossOnDispositionOfAssets1	(920)us-gaap_GainLossOnDispositionOfAssets1
Change in contingent consideration		(29,368)
Changes in operating assets and liabilities:
Accounts receivable	(4,200)	(26,939)
Inventory and deferred cost of sales	(7,249)us-gaap_IncreaseDecreaseInInventories	8,150us-gaap_IncreaseDecreaseInInventories
Prepaid expenses and other current assets	(8,970)	(3,410)
Accounts payable and accrued expenses	11,157	(2,240)
Customer deposits and deferred revenue	13,989	6,416
Income taxes receivable and payable, net	2,600	(612)
Other, net	628	1,667
Net cash provided by (used in) operating activities	4,288	(18,401)
Cash Flows from Investing Activities
Capital expenditures	(4,781)	(2,138)
Proceeds from the liquidation of short-term investments	43,556	32,030
Payments for purchases of short-term investments	(11,998)	(17,989)
Proceeds from sale of lab tools	1,413	2,340
Other	(68)	(124)
Net cash provided by investing activities	28,122	14,119
Cash Flows from Financing Activities
Proceeds from stock option exercises	45	8,316
Payments of tax withholdings - restricted shares	(52)	(170)
Repayments of long-term debt	(76)us-gaap_RepaymentsOfLongTermDebt	(70)us-gaap_RepaymentsOfLongTermDebt
Net cash provided by (used in) financing activities	(83)	8,076
Effect of exchange rate changes on cash and cash equivalents	(15)	89
Net increase in cash and cash equivalents	32,312	3,883
Cash and cash equivalents - beginning of period	270,811	210,799
Cash and cash equivalents - end of period	303,123	214,682
Supplemental disclosure of cash flow information
Interest paid	36us-gaap_InterestPaid	42us-gaap_InterestPaid
Income taxes paid	$ 544us-gaap_IncomeTaxesPaid	$ 1,851us-gaap_IncomeTaxesPaid

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No definition available.

+ Details

Name:	veco_IncreaseDecreaseInAccruedLiabilitiesCustomerDepositsDeferredRevenueAndOtherCurrentLiabilities
Namespace Prefix:	veco_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration