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Share-based compensation (Details) (USD $)
In Thousands, except Per Share data, unless otherwise specified
3 Months Ended
Mar. 31, 2015
Mar. 31, 2014
Weighted-Average Grant-Date Fair Value    
Total share-based compensation expense $ 3,998us-gaap_AllocatedShareBasedCompensationExpense $ 4,722us-gaap_AllocatedShareBasedCompensationExpense
Cost of Sales    
Weighted-Average Grant-Date Fair Value    
Total share-based compensation expense 601us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_CostOfSalesMember
560us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_CostOfSalesMember
Selling, General and Administrative Expenses    
Weighted-Average Grant-Date Fair Value    
Total share-based compensation expense 2,798us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_SellingGeneralAndAdministrativeExpensesMember
3,101us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_SellingGeneralAndAdministrativeExpensesMember
Research and Development Expense.    
Weighted-Average Grant-Date Fair Value    
Total share-based compensation expense $ 599us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_ResearchAndDevelopmentExpenseMember
$ 1,061us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_ResearchAndDevelopmentExpenseMember
Restricted Stock Awards    
Restricted stock awards including restricted stock units, Shares    
Outstanding at the beginning of the period (in shares) 1,237us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Granted (in shares) 39us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Vested (in shares) (4)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Forfeited (in shares) (53)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Outstanding at the end of the period (in shares) 1,219us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Weighted-Average Grant-Date Fair Value    
Outstanding at the beginning of the period (in dollars per share) $ 34.27us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Grants (in dollars per share) $ 31.56us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Vested/released (in dollars per share) $ 32.88us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Forfeitures (in dollars per share) $ 35.99us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Outstanding at the end of the period (in dollars per share) $ 34.11us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember
 
Restricted Stock Awards | Minimum    
Weighted-Average Grant-Date Fair Value    
Expiration term 1 year  
Restricted Stock Awards | Maximum    
Weighted-Average Grant-Date Fair Value    
Expiration term 5 years  
Stock options    
Stock option awards, Shares    
Outstanding at the beginning of the period (in shares) 2,391us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Granted (in shares) 10us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Exercised (in shares) (10)us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Expired or forfeited (in shares) (62)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Outstanding at the end of the period (in shares) 2,329us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Weighted Average Exercise price    
Outstanding at the beginning of the period (in dollars per share) $ 31.65us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Grants (in dollars per share) $ 30.49us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Exercised (in dollars per share) $ 28.77us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Expired or forfeited (in dollars per share) $ 36.03us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Outstanding at the end of the period (in dollars per share) $ 31.54us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember