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Liabilities (Details 2) (USD $)
3 Months Ended
Mar. 31, 2015
Mar. 31, 2014
Dec. 31, 2014
Reconciliation of the restructuring liability      
Balance at the beginning of the period $ 1,428,000us-gaap_RestructuringReserve    
Provision 2,357,000us-gaap_RestructuringCharges 392,000us-gaap_RestructuringCharges  
Payments (2,292,000)us-gaap_PaymentsForRestructuring    
Balance at the end of the period 1,493,000us-gaap_RestructuringReserve    
Customer Deposits and Deferred Revenue      
Customer deposits 66,700,000us-gaap_CustomerDepositsCurrent   73,000,000us-gaap_CustomerDepositsCurrent
Hyeongok-ri, South Korea Facility      
Reconciliation of the restructuring liability      
Number of employees impacted 23us-gaap_RestructuringAndRelatedCostNumberOfPositionsEliminated
/ us-gaap_RestructuringPlanAxis
= veco_HyeongokRiSouthKoreaFacilityMember
   
Personnel severance and related costs      
Reconciliation of the restructuring liability      
Balance at the beginning of the period 1,428,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
   
Provision 1,532,000us-gaap_RestructuringCharges
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
   
Payments (1,839,000)us-gaap_PaymentsForRestructuring
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
   
Balance at the end of the period 1,121,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
   
Facility Closing Costs      
Reconciliation of the restructuring liability      
Provision 825,000us-gaap_RestructuringCharges
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_FacilityClosingMember
   
Payments (453,000)us-gaap_PaymentsForRestructuring
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_FacilityClosingMember
   
Balance at the end of the period $ 372,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_FacilityClosingMember