Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold or consumed after one year or beyond the normal operating cycle, if longer.

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For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

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Segment Reporting and Geographic Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2014	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales	$ 113,569us-gaap_SalesRevenueNet	$ 93,341us-gaap_SalesRevenueNet	$ 95,122us-gaap_SalesRevenueNet	$ 90,841us-gaap_SalesRevenueNet	$ 73,209us-gaap_SalesRevenueNet	$ 99,324us-gaap_SalesRevenueNet	$ 97,435us-gaap_SalesRevenueNet	$ 61,781us-gaap_SalesRevenueNet	$ 392,873us-gaap_SalesRevenueNet	$ 331,749us-gaap_SalesRevenueNet	$ 516,020us-gaap_SalesRevenueNet
Long-Lived Assets	78,752us-gaap_AssetsNoncurrent				89,139us-gaap_AssetsNoncurrent				78,752us-gaap_AssetsNoncurrent	89,139us-gaap_AssetsNoncurrent	98,302us-gaap_AssetsNoncurrent
United States
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales									44,060	57,609	83,317
Long-Lived Assets	63,349				66,002				63,349	66,002	74,497
Asia Pacific
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales									311,182	252,199	390,995
Long-Lived Assets	15,325				23,042				15,325	23,042	23,769
China \| Net Sales to Customers \| Geographic Concentration Risk
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Percentage of net sales of customers to total net sales									40.00%	45.00%	42.00%
EMEA and other
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales									37,631	21,941	41,708
Long-Lived Assets	78				95				78	95	36
MOCVD
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales									279,751	219,914	314,152
MBE
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales									28,033	29,419	49,029
Surface Processing
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales									7,906
Ion Beam and other
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries
Net sales									$ 77,183	$ 82,416	$ 152,839