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Income Taxes (Details 4) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Deferred tax assets:    
Inventory valuation $ 8,244,000us-gaap_DeferredTaxAssetsInventory $ 6,983,000us-gaap_DeferredTaxAssetsInventory
Net operating losses and credit carry forwards 39,750,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsDomestic 18,972,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsDomestic
Warranty and installation accruals 2,452,000us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves 3,002,000us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves
Share-based compensation 11,794,000us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost 10,638,000us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost
Other 2,647,000us-gaap_DeferredTaxAssetsOther 3,716,000us-gaap_DeferredTaxAssetsOther
Total deferred tax assets 64,887,000us-gaap_DeferredTaxAssetsGross 43,311,000us-gaap_DeferredTaxAssetsGross
Valuation allowance (34,909,000)us-gaap_DeferredTaxAssetsValuationAllowance (7,753,000)us-gaap_DeferredTaxAssetsValuationAllowance
Net deferred tax assets 29,978,000us-gaap_DeferredTaxAssetsNet 35,558,000us-gaap_DeferredTaxAssetsNet
Deferred tax liabilities:    
Purchased intangible assets 34,018,000us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets 45,208,000us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets
Undistributed earnings 1,047,000us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings 1,737,000us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings
Depreciation 2,274,000us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment 4,711,000us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment
Total deferred tax liabilities 37,339,000us-gaap_DeferredTaxLiabilities 51,656,000us-gaap_DeferredTaxLiabilities
Net deferred taxes (7,361,000)us-gaap_DeferredTaxAssetsLiabilitiesNet (16,098,000)us-gaap_DeferredTaxAssetsLiabilitiesNet
Undistributed earnings of foreign subsidiaries 115,800,000us-gaap_UndistributedEarningsOfForeignSubsidiaries 101,000,000us-gaap_UndistributedEarningsOfForeignSubsidiaries
Valuation allowance    
Increase in valuation allowance 27,200,000us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount  
Federal    
Valuation allowance    
Net operating loss carryforwards 53,300,000us-gaap_OperatingLossCarryforwards
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_DomesticCountryMember
 
Research and development tax credits 9,200,000veco_IncomeTaxReconciliationTaxCreditsResearchAttributableToPreviousYear
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_DomesticCountryMember
 
Foreign    
Valuation allowance    
Net tax credit carryforwards $ 7,000,000us-gaap_TaxCreditCarryforwardAmount
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_ForeignCountryMember