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Retirement Plans (Details) (USD $)
In Millions, unless otherwise specified
 12 Months Ended
Dec. 31, 2014
item
Dec. 31, 2013
Dec. 31, 2012
Sep. 30, 2014
item
Employer's matching contribution for every dollar the employees contribute (as a percent) 50.00%us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch      
Employer's matching contribution, vesting period (in years) 5 years      
Number of foreign subsidiaries with defined contribution plan 1veco_DefinedContributionPlanNumberOfForeignSubsidiaries      
Aggregate employer's contribution to pension plans $ 1.9us-gaap_DefinedContributionPlanCostRecognized $ 2.3us-gaap_DefinedContributionPlanCostRecognized $ 2.5us-gaap_DefinedContributionPlanCostRecognized  
Number of participants       73veco_DefinedContributionPlanNumberOfParticipants
Contract assets under the plan       $ 1.5us-gaap_DefinedBenefitPlanFairValueOfPlanAssets
Maximum        
Employer's contribution as a percentage of employee's eligible compensation 3.00%us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent
/ us-gaap_RangeAxis
= us-gaap_MaximumMember		      
Employer's contribution as a percentage of the maximum an employee is permitted to contribute under IRS limits 3.00%veco_DefinedContributionPlanEmployerMatchingContributionPercentOfMaximumAllowableEmployeeContribution
/ us-gaap_RangeAxis
= us-gaap_MaximumMember