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Stock Plans (Details 4) (USD $)
Share data in Thousands, except Per Share data, unless otherwise specified
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Weighted-Average Grant-Date Fair Value      
Dividends expected to be paid $ 0us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPayments    
Total grant date fair value of shares vested $ 6,200,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue $ 7,900,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue $ 5,400,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue
Restricted Stock Awards and Restricted Stock Units      
Restricted stock awards including restricted stock units, Shares      
Outstanding at the beginning of the period (in shares) 1,158us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
693us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
618us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Granted (in shares) 395us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
798us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
324us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Released (in shares) (183)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
(207)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
(167)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Forfeitures (in shares) (133)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
(126)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
(82)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Outstanding at the end of the period (in shares) 1,237us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
1,158us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
693us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Weighted-Average Grant-Date Fair Value      
Outstanding at the beginning of the period (in dollars per share) $ 34.93us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 36.11us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 33.61us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Granted (in dollars per share) $ 34.18us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 33.16us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 32.62us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Released (in dollars per share) $ 38.65us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 32.44us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 20.60us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Forfeitures (including cancelled awards) (in dollars per share) $ 33.66us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 34.33us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 34.98us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Outstanding at the end of the period (in dollars per share) $ 34.27us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 34.93us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
$ 36.11us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember
Restricted Stock Awards | Minimum      
Weighted-Average Grant-Date Fair Value      
Expiration term 1 year    
Restricted Stock Awards | Maximum      
Weighted-Average Grant-Date Fair Value      
Expiration term 5 years    
Restricted Stock Units | Minimum      
Weighted-Average Grant-Date Fair Value      
Vesting period 1 year    
Restricted Stock Units | Maximum      
Weighted-Average Grant-Date Fair Value      
Vesting period 5 years