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Stock Plans (Details 3) (USD $)
In Thousands, except Per Share data, unless otherwise specified
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Options Outstanding      
Shares 2,391us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions    
Aggregate Intrinsic Value $ 12,395us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue    
Weighted-Average Remaining Contractual Life 6 years 2 months 12 days    
Weighted-Average Exercise Price (in dollars per share) $ 31.65us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1    
Options Exercisable      
Shares 1,409us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions    
Aggregate Intrinsic Value 10,127us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1    
Weighted Average Remaining Contractual life 5 years 2 months 12 days    
Weighted-Average Exercise Price (in dollars per share) $ 30.76us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1    
Assumptions based on which fair value of each option granted was estimated using the Black-Scholes option-pricing model      
Cash received from options exercised 12,056us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions 2,199us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions 5,409us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions
Intrinsic value of options exercised 8,390us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue 2,509us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue 6,800us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
$8.82 - $17.48      
Information about stock options outstanding      
Exercise price, low end of range (in dollars per share) $ 8.82us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
Exercise price, high end of range (in dollars per share) $ 17.48us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
Options Outstanding      
Shares 386us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
Aggregate Intrinsic Value 8,769us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
Weighted-Average Remaining Contractual Life 1 year 3 months 18 days    
Weighted-Average Exercise Price (in dollars per share) $ 12.15us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
Options Exercisable      
Shares 386us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
Aggregate Intrinsic Value 8,769us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
Weighted Average Remaining Contractual life 1 year 3 months 18 days    
Weighted-Average Exercise Price (in dollars per share) $ 12.15us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeOneMember
   
$20.80 - $31.45      
Information about stock options outstanding      
Exercise price, low end of range (in dollars per share) $ 20.80us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
Exercise price, high end of range (in dollars per share) $ 31.45us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
Options Outstanding      
Shares 347us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
Aggregate Intrinsic Value 1,626us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
Weighted-Average Remaining Contractual Life 8 years 9 months 18 days    
Weighted-Average Exercise Price (in dollars per share) $ 30.20us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
Options Exercisable      
Shares 125us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
Aggregate Intrinsic Value 616us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
Weighted Average Remaining Contractual life 8 years 8 months 12 days    
Weighted-Average Exercise Price (in dollars per share) $ 29.94us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeTwoMember
   
$31.91 - $48.04      
Information about stock options outstanding      
Exercise price, low end of range (in dollars per share) $ 31.91us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
Exercise price, high end of range (in dollars per share) $ 48.04us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
Options Outstanding      
Shares 1,429us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
Aggregate Intrinsic Value 2,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
Weighted-Average Remaining Contractual Life 6 years 10 months 24 days    
Weighted-Average Exercise Price (in dollars per share) $ 34.14us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
Options Exercisable      
Shares 669us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
Aggregate Intrinsic Value $ 742us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
Weighted Average Remaining Contractual life 6 years 4 months 24 days    
Weighted-Average Exercise Price (in dollars per share) $ 34.63us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeThreeMember
   
$48.90 - $51.70      
Information about stock options outstanding      
Exercise price, low end of range (in dollars per share) $ 48.90us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeFourMember
   
Exercise price, high end of range (in dollars per share) $ 51.70us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeFourMember
   
Options Outstanding      
Shares 229us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeFourMember
   
Weighted-Average Remaining Contractual Life 6 years 4 months 24 days    
Weighted-Average Exercise Price (in dollars per share) $ 51.21us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeFourMember
   
Options Exercisable      
Shares 229us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeFourMember
   
Weighted Average Remaining Contractual life 6 years 4 months 24 days    
Weighted-Average Exercise Price (in dollars per share) $ 51.21us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= veco_RangeOfExercisePricesRangeFourMember
   
Stock Options      
Assumptions based on which fair value of each option granted was estimated using the Black-Scholes option-pricing model      
Weighted average fair value $ 11.58us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 13.47us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 15.56us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Dividend yield 0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Expected volatility factor 44.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
49.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
59.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Risk-free interest rate 1.19%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
1.27%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
0.70%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Expected life (in years) 3 years 10 months 24 days 4 years 6 months 4 years 6 months