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Stock Plans (Details) (USD $)
In Thousands, except Share data, unless otherwise specified
 12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Dec. 31, 2011
Unrecognized share-based compensation costs        
Unrecognized Share-Based Compensation Costs $ 40,427us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized      
Weighted Average Period Expected to be Recognized 2 years 6 months      
Inducement Plan        
Equity Compensation Plans        
Common stock available for issuance (in shares)   0us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
/ us-gaap_PlanNameAxis
= veco_InducementStockIncentivePlan2013Member		    
2010 Stock Incentive Plan        
Equity Compensation Plans        
Maximum number of shares authorized to be issued 6,800,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized
/ us-gaap_PlanNameAxis
= veco_StockIncentivePlan2010Member		      
Total        
Common Stock, Capital Shares Reserved for Future Issuance upon Exercise of Stock Options and Grants of Restricted Stock 4,900,000veco_CommonStockCapitalSharesReservedForFutureIssuanceUponExerciseOfStockOptionsAndGrantsOfRestrictedStock
/ us-gaap_PlanNameAxis
= veco_StockIncentivePlan2010Member		      
2000 Stock Incentive Plan        
Equity Compensation Plans        
Common stock available for issuance (in shares) 0us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
/ us-gaap_PlanNameAxis
= veco_StockIncentivePlan2000Member		      
Number of options outstanding (in shares) 400,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_PlanNameAxis
= veco_StockIncentivePlan2000Member		      
Expiration term 7 years      
2000 Stock Incentive Plan | Minimum        
Equity Compensation Plans        
Vesting period 2 years      
2000 Stock Incentive Plan | Maximum        
Equity Compensation Plans        
Vesting period 5 years      
Stock Options        
Equity Compensation Plans        
Number of options outstanding (in shares) 2,391,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		 2,598,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		 2,322,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		 2,106,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Unrecognized share-based compensation costs        
Unrecognized Share-Based Compensation Costs 9,939us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Weighted Average Period Expected to be Recognized 2 years      
Vested        
Number of Shares 1,409,000veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Weighted Average Exercise Price $ 30.76veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Weighted Average Remaining Contractual Life 5 years 2 months 12 days      
Aggregate Intrinsic Value 10,127veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedOutstandingAggregateIntrinsicValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Expected to vest        
Number of shares 903,000veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpectedToVestOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Weighted Average Exercise Price $ 32.93veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpectedToVestOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Weighted Average Remaining Contractual Life 7 years 8 months 12 days      
Aggregate Intrinsic Value 2,091veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpectedToVestOutstandingAggregateIntrinsicValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Total        
Number of shares 2,312,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Weighted Average Exercise Price $ 31.61us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Weighted Average Remaining Contractual Life 6 years 2 months 12 days      
Aggregate Intrinsic Value 12,218us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Closing price $ 34.88us-gaap_SharePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember		      
Stock Options | Inducement Plan        
Equity Compensation Plans        
Stock issued (in shares)   124,500us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardSharesIssuedInPeriod
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
/ us-gaap_PlanNameAxis
= veco_InducementStockIncentivePlan2013Member		    
Vesting period   3 years    
Term of awards   10 years    
Number of options outstanding (in shares) 124,500us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
/ us-gaap_PlanNameAxis
= veco_InducementStockIncentivePlan2013Member		      
Stock Options | 2010 Stock Incentive Plan        
Equity Compensation Plans        
Vesting period 3 years      
Number of options outstanding (in shares) 1,900,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
/ us-gaap_PlanNameAxis
= veco_StockIncentivePlan2010Member		      
Stock Options | 2010 Stock Incentive Plan | Minimum        
Equity Compensation Plans        
Term of awards 7 years      
Stock Options | 2010 Stock Incentive Plan | Maximum        
Equity Compensation Plans        
Term of awards 10 years      
Restricted Stock Awards and Restricted Stock Units        
Equity Compensation Plans        
Awards granted (in shares) 395,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember		 798,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember		 324,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardsAndRestrictedStockUnitsMember		  
Restricted Stock Awards and Restricted Stock Units | 2010 Stock Incentive Plan | Minimum        
Equity Compensation Plans        
Vesting period 1 year      
Restricted Stock Awards and Restricted Stock Units | 2010 Stock Incentive Plan | Maximum        
Equity Compensation Plans        
Vesting period 5 years      
Restricted Stock Units        
Unrecognized share-based compensation costs        
Unrecognized Share-Based Compensation Costs 9,980us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockUnitsRSUMember		      
Weighted Average Period Expected to be Recognized 2 years 6 months      
Restricted Stock Units | Minimum        
Equity Compensation Plans        
Vesting period 1 year      
Restricted Stock Units | Maximum        
Equity Compensation Plans        
Vesting period 5 years      
Restricted Stock Units | Inducement Plan        
Equity Compensation Plans        
Stock issued (in shares)   87,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardSharesIssuedInPeriod
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockUnitsRSUMember
/ us-gaap_PlanNameAxis
= veco_InducementStockIncentivePlan2013Member		    
Number of options outstanding (in shares) 82,700us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockUnitsRSUMember
/ us-gaap_PlanNameAxis
= veco_InducementStockIncentivePlan2013Member		      
Restricted Stock Units | Inducement Plan | Minimum        
Equity Compensation Plans        
Vesting period   2 years    
Restricted Stock Units | Inducement Plan | Maximum        
Equity Compensation Plans        
Vesting period   4 years    
Restricted Stock Units | 2010 Stock Incentive Plan        
Equity Compensation Plans        
Number of options outstanding (in shares) 400,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockUnitsRSUMember
/ us-gaap_PlanNameAxis
= veco_StockIncentivePlan2010Member		      
Restricted Stock Awards        
Unrecognized share-based compensation costs        
Unrecognized Share-Based Compensation Costs 17,501us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
/ us-gaap_AwardTypeAxis
= veco_RestrictedStockAwardMember		      
Weighted Average Period Expected to be Recognized 2 years 9 months 18 days      
Restricted Stock Awards | Minimum        
Equity Compensation Plans        
Expiration term 1 year      
Restricted Stock Awards | Maximum        
Equity Compensation Plans        
Expiration term 5 years      
Performance Share Units        
Unrecognized share-based compensation costs        
Unrecognized Share-Based Compensation Costs 2,855us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
/ us-gaap_AwardTypeAxis
= veco_PerformanceShareUnitsMember		      
Weighted Average Period Expected to be Recognized 3 years 3 months 18 days      
Performance Share Awards        
Unrecognized share-based compensation costs        
Unrecognized Share-Based Compensation Costs $ 152us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
/ us-gaap_AwardTypeAxis
= veco_PerformanceShareAwardsMember		      
Weighted Average Period Expected to be Recognized 4 months 24 days