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Consolidated Statements of Cash Flows (USD $)
In Thousands, unless otherwise specified
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Cash Flows from Operating Activities      
Net income (loss) $ (66,940)us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic $ (42,263)us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic $ 30,928us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic
Adjustments to reconcile net income (loss) to net cash from operating activities:      
Depreciation and amortization 24,573us-gaap_DepreciationDepletionAndAmortization 18,425us-gaap_DepreciationDepletionAndAmortization 16,192us-gaap_DepreciationDepletionAndAmortization
Deferred income taxes (11,330)veco_DeferredIncomeTaxNoncashExpenseBenefit (12,264)veco_DeferredIncomeTaxNoncashExpenseBenefit (340)veco_DeferredIncomeTaxNoncashExpenseBenefit
Share-based compensation expense 18,813us-gaap_ShareBasedCompensation 13,130us-gaap_ShareBasedCompensation 14,268us-gaap_ShareBasedCompensation
Excess tax benefits from equity-based compensation     (2,119)us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities
Provision (recovery) for bad debt (1,814)us-gaap_ProvisionForDoubtfulAccounts 1,946us-gaap_ProvisionForDoubtfulAccounts 198us-gaap_ProvisionForDoubtfulAccounts
Impairment of long-lived assets 58,170us-gaap_ImpairmentOfLongLivedAssetsToBeDisposedOf 1,220us-gaap_ImpairmentOfLongLivedAssetsToBeDisposedOf 1,335us-gaap_ImpairmentOfLongLivedAssetsToBeDisposedOf
Gain on sale of lab tools (1,549)us-gaap_GainLossOnDispositionOfAssets1 (767)us-gaap_GainLossOnDispositionOfAssets1  
Gain on disposal of segment     (4,112)us-gaap_DiscontinuedOperationGainLossOnDisposalOfDiscontinuedOperationNetOfTax
Gain on cumulative translation adjustment (3,142)us-gaap_ForeignCurrencyTransactionGainLossBeforeTax    
Changes in contingent consideration (29,368)us-gaap_BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationAsset1 829us-gaap_BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationAsset1  
Changes in operating assets and liabilities:      
Accounts receivable (25,390)us-gaap_IncreaseDecreaseInAccountsReceivable 36,898us-gaap_IncreaseDecreaseInAccountsReceivable 31,017us-gaap_IncreaseDecreaseInAccountsReceivable
Inventories and deferred cost of sales 6,513us-gaap_IncreaseDecreaseInInventories 2,753us-gaap_IncreaseDecreaseInInventories 53,937us-gaap_IncreaseDecreaseInInventories
Prepaid expenses and other current assets (2,245)us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets 842us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets 8,524us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
Accounts payable and accrued expenses (5,534)us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities 7,542us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities (12,106)us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
Customer deposits and deferred revenue 55,536us-gaap_IncreaseDecreaseInDeferredRevenueAndCustomerAdvancesAndDeposits (17,329)us-gaap_IncreaseDecreaseInDeferredRevenueAndCustomerAdvancesAndDeposits (34,227)us-gaap_IncreaseDecreaseInDeferredRevenueAndCustomerAdvancesAndDeposits
Income taxes receivable and payable, net 20,279us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable (12,734)us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable 1,853us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable
Other, net 5,497us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet 2,499us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet 9,253us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet
Discontinued operations     (2,638)us-gaap_CashProvidedByUsedInOperatingActivitiesDiscontinuedOperations
Net cash provided by operating activities 42,069us-gaap_NetCashProvidedByUsedInOperatingActivities 727us-gaap_NetCashProvidedByUsedInOperatingActivities 111,963us-gaap_NetCashProvidedByUsedInOperatingActivities
Cash Flows from Investing Activities      
Acquisition of business, net of cash acquired (144,069)us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired (71,488)us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired  
Capital expenditures (15,588)us-gaap_PaymentsToAcquirePropertyPlantAndEquipment (9,174)us-gaap_PaymentsToAcquirePropertyPlantAndEquipment (24,994)us-gaap_PaymentsToAcquirePropertyPlantAndEquipment
Proceeds from the liquidation of investments 318,276us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities 499,645us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities 244,929us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities
Payments for purchases of investments (157,737)us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt (589,099)us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt (165,080)us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt
Payments for purchase of cost method investment (2,388)us-gaap_PaymentsToAcquireOtherInvestments (2,391)us-gaap_PaymentsToAcquireOtherInvestments (10,341)us-gaap_PaymentsToAcquireOtherInvestments
Proceeds from sale of assets from discontinued segment     3,758veco_ProceedsFromSaleOfAssetsFromDiscontinuedSegment
Proceeds from sale of lab tools 9,259us-gaap_ProceedsFromSaleOfProductiveAssets 4,440us-gaap_ProceedsFromSaleOfProductiveAssets  
Other 350us-gaap_PaymentsForProceedsFromOtherInvestingActivities 11us-gaap_PaymentsForProceedsFromOtherInvestingActivities 49us-gaap_PaymentsForProceedsFromOtherInvestingActivities
Net cash provided by (used in) investing activities 8,103us-gaap_NetCashProvidedByUsedInInvestingActivities (168,056)us-gaap_NetCashProvidedByUsedInInvestingActivities 48,321us-gaap_NetCashProvidedByUsedInInvestingActivities
Cash Flows from Financing Activities      
Proceeds from stock option exercises 12,056us-gaap_ProceedsFromStockOptionsExercised 2,199us-gaap_ProceedsFromStockOptionsExercised 5,409us-gaap_ProceedsFromStockOptionsExercised
Restricted stock tax withholdings (2,075)us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation (2,696)us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation (1,725)us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation
Excess tax benefits from equity-based compensation     2,119us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities
Contingent consideration payments   (5,000)veco_BusinessCombinationContingentConsiderationEarnedAndPaid  
Repayments of long-term debt (290)us-gaap_RepaymentsOfLongTermDebt (269)us-gaap_RepaymentsOfLongTermDebt (248)us-gaap_RepaymentsOfLongTermDebt
Net cash provided by (used in) financing activities 9,691us-gaap_NetCashProvidedByUsedInFinancingActivities (5,766)us-gaap_NetCashProvidedByUsedInFinancingActivities 5,555us-gaap_NetCashProvidedByUsedInFinancingActivities
Effect of exchange rate changes on cash and cash equivalents 149us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents (663)us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents 796us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents
Net increase (decrease) in cash and cash equivalents 60,012us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease (173,758)us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease 166,635us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease
Cash and cash equivalents as of beginning of period 210,799us-gaap_CashAndCashEquivalentsAtCarryingValue 384,557us-gaap_CashAndCashEquivalentsAtCarryingValue 217,922us-gaap_CashAndCashEquivalentsAtCarryingValue
Cash and cash equivalents as of end of period 270,811us-gaap_CashAndCashEquivalentsAtCarryingValue 210,799us-gaap_CashAndCashEquivalentsAtCarryingValue 384,557us-gaap_CashAndCashEquivalentsAtCarryingValue
Supplemental disclosure of cash flow information      
Interest paid 159us-gaap_InterestPaid 357us-gaap_InterestPaid 209us-gaap_InterestPaid
Income taxes paid $ 3,320us-gaap_IncomeTaxesPaid $ 8,001us-gaap_IncomeTaxesPaid $ 11,566us-gaap_IncomeTaxesPaid