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Commitments and Contingencies (Details 4) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 60,085,000us-gaap_AccountsReceivableNetCurrent $ 23,823,000us-gaap_AccountsReceivableNetCurrent
Purchase Commitments    
Purchase commitments due within one year 112,400,000us-gaap_PurchaseObligationDueInNextTwelveMonths  
Supplier deposits against purchase commitments 12,700,000us-gaap_DepositAssets 9,400,000us-gaap_DepositAssets
Minimum    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Credit period for accounts receivable 30 days  
Maximum    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Credit period for accounts receivable 90 days  
Asia Pacific    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 42,177,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= us-gaap_AsiaPacificMember
13,899,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= us-gaap_AsiaPacificMember
China    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 17,911,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_CN
4,130,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_CN
Korea    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 8,118,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_KR
2,411,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_KR
Thailand    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 6,324,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_TH
2,041,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_TH
Taiwan    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 5,838,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_TW
427,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_TW
Other    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 3,986,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= veco_OtherAsiaPacificMember
4,890,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= veco_OtherAsiaPacificMember
United States    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 13,139,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_US
8,369,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= country_US
EMEA and other    
Net sales attributable to the geographic location in which the customer facility is located and long-lived assets related to operations in United States and other foreign countries    
Accounts Receivable, Net, Current 4,769,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= veco_EuropeMiddleEastAfricaAndOtherMember
$ 1,555,000us-gaap_AccountsReceivableNetCurrent
/ us-gaap_StatementGeographicalAxis
= veco_EuropeMiddleEastAfricaAndOtherMember