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Commitments and Contingencies (Details 3)
12 Months Ended
Dec. 31, 2014
item
Dec. 31, 2013
Dec. 31, 2012
Accounts Receivable | Credit Concentration Risk | Top Ten Customers      
Concentration of Credit Risk      
Number of top customers 10veco_NumberOfTopCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_TopTenCustomersMember
   
Percentage of total accounts receivable from top customers 65.00%veco_PercentageOfAccountsReceivableFromMajorCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_TopTenCustomersMember
69.00%veco_PercentageOfAccountsReceivableFromMajorCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_TopTenCustomersMember
 
Accounts Receivable | Credit Concentration Risk | Customer B      
Concentration of Credit Risk      
Concentration Risk (as a percent) 20.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerBMember
10.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerBMember
 
Accounts Receivable | Credit Concentration Risk | Customer C      
Concentration of Credit Risk      
Concentration Risk (as a percent) 13.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerCMember
11.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerCMember
 
Accounts Receivable | Credit Concentration Risk | Customer D      
Concentration of Credit Risk      
Concentration Risk (as a percent)   23.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerDMember
 
Net Sales | Customer Concentration Risk | Customer A      
Concentration of Credit Risk      
Concentration Risk (as a percent) 15.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerAMember
   
Net Sales | Customer Concentration Risk | Customer B      
Concentration of Credit Risk      
Concentration Risk (as a percent) 11.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerBMember
14.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerBMember
 
Net Sales | Customer Concentration Risk | Customer D      
Concentration of Credit Risk      
Concentration Risk (as a percent)     14.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= veco_CustomerDMember