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Restructuring Charges (Details) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Reconciliation of the restructuring liability      
Balance at the beginning of the period $ 533,000us-gaap_RestructuringReserve $ 1,875,000us-gaap_RestructuringReserve  
Provision 4,394,000us-gaap_RestructuringCharges 1,485,000us-gaap_RestructuringCharges 3,813,000us-gaap_RestructuringCharges
Payments (3,499,000)us-gaap_PaymentsForRestructuring (2,827,000)us-gaap_PaymentsForRestructuring  
Balance at the end of the period 1,428,000us-gaap_RestructuringReserve 533,000us-gaap_RestructuringReserve 1,875,000us-gaap_RestructuringReserve
Personnel Severance and Related Costs      
Reconciliation of the restructuring liability      
Balance at the beginning of the period 533,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
1,875,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
 
Provision 4,012,000us-gaap_RestructuringCharges
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
1,485,000us-gaap_RestructuringCharges
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
 
Payments (3,117,000)us-gaap_PaymentsForRestructuring
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
(2,827,000)us-gaap_PaymentsForRestructuring
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
 
Balance at the end of the period 1,428,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
533,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
1,875,000us-gaap_RestructuringReserve
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
Personnel severance charges     3,800,000us-gaap_SeveranceCosts1
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
Number of employees impacted 93us-gaap_RestructuringAndRelatedCostNumberOfPositionsEliminated
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
  52us-gaap_RestructuringAndRelatedCostNumberOfPositionsEliminated
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_EmployeeSeveranceMember
Facility Closing Costs      
Reconciliation of the restructuring liability      
Provision 382,000us-gaap_RestructuringCharges
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_FacilityClosingMember
   
Payments (382,000)us-gaap_PaymentsForRestructuring
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_FacilityClosingMember
   
Facility Closing Costs | Ft. Collins, Colorado and Camarillo, California facilities      
Reconciliation of the restructuring liability      
Restructuring Costs 400,000us-gaap_RestructuringCosts
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_FacilityClosingMember
/ us-gaap_RestructuringPlanAxis
= veco_FortCollinsColoradoAndCamarilloCaliforniaFacilitiesConsolidationMember
   
Facility Closing Costs | Forecast      
Reconciliation of the restructuring liability      
Provision $ 500,000us-gaap_RestructuringCharges
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_FacilityClosingMember
/ us-gaap_StatementScenarioAxis
= us-gaap_ScenarioForecastMember