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Goodwill and Intangible Assets (Details) (USD $)
In Thousands, unless otherwise specified
12 Months Ended 3 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Dec. 31, 2014
Goodwill        
Gross carrying Amount, beginning balance $ 186,589us-gaap_GoodwillGross $ 151,069us-gaap_GoodwillGross    
Accumulated Impairment, beginning balance 95,241us-gaap_GoodwillImpairedAccumulatedImpairmentLoss 95,241us-gaap_GoodwillImpairedAccumulatedImpairmentLoss    
Net Amount, beginning balance 91,348us-gaap_Goodwill 55,828us-gaap_Goodwill    
Acquisition 51,396us-gaap_GoodwillAcquiredDuringPeriod 35,520us-gaap_GoodwillAcquiredDuringPeriod    
Purchase price adjustment 173us-gaap_GoodwillPurchaseAccountingAdjustments      
Impairments 27,958us-gaap_GoodwillImpairmentLoss      
Gross carrying Amount, ending balance 238,158us-gaap_GoodwillGross 186,589us-gaap_GoodwillGross 151,069us-gaap_GoodwillGross 238,158us-gaap_GoodwillGross
Accumulated Impairment, ending balance 123,199us-gaap_GoodwillImpairedAccumulatedImpairmentLoss 95,241us-gaap_GoodwillImpairedAccumulatedImpairmentLoss 95,241us-gaap_GoodwillImpairedAccumulatedImpairmentLoss 123,199us-gaap_GoodwillImpairedAccumulatedImpairmentLoss
Net Amount, ending balance 114,959us-gaap_Goodwill 91,348us-gaap_Goodwill 55,828us-gaap_Goodwill 114,959us-gaap_Goodwill
Asset impairment 58,170us-gaap_AssetImpairmentCharges 1,220us-gaap_AssetImpairmentCharges 1,335us-gaap_AssetImpairmentCharges  
Certain tangible assets        
Goodwill        
Asset impairment       3,600us-gaap_AssetImpairmentCharges
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= veco_CertainTangibleAssetsMember
Goodwill        
Goodwill        
Asset impairment       28,000us-gaap_AssetImpairmentCharges
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_GoodwillMember
Other long-lived assets        
Goodwill        
Asset impairment       25,900us-gaap_AssetImpairmentCharges
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_IndefinitelivedIntangibleAssetsMember
Other long-lived assets | Customer relationship        
Goodwill        
Asset impairment       17,400us-gaap_AssetImpairmentCharges
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_IndefinitelivedIntangibleAssetsMember
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_CustomerRelationshipsMember
Other long-lived assets | IPR&D        
Goodwill        
Asset impairment       $ 4,800us-gaap_AssetImpairmentCharges
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_IndefinitelivedIntangibleAssetsMember
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_InProcessResearchAndDevelopmentMember