Discontinued Operations (Details) (USD $)	3 Months Ended		9 Months Ended			3 Months Ended		9 Months Ended			1 Months Ended	3 Months Ended		9 Months Ended
	Sep. 30, 2011	Sep. 30, 2010	Sep. 30, 2011	Sep. 30, 2010	Dec. 31, 2010	Sep. 30, 2011 CIGS Solar Systems Business	Sep. 30, 2010 CIGS Solar Systems Business	Sep. 30, 2011 CIGS Solar Systems Business	Sep. 30, 2010 CIGS Solar Systems Business	Jul. 28, 2011 CIGS Solar Systems Business employee	Oct. 31, 2010 Metrology Segment Disposal	Sep. 30, 2011 Metrology Segment Disposal	Sep. 30, 2010 Metrology Segment Disposal	Sep. 30, 2011 Metrology Segment Disposal	Sep. 30, 2010 Metrology Segment Disposal	Oct. 07, 2010 Metrology Segment Disposal Y	Aug. 15, 2010 Metrology Segment Disposal
Information related to discontinued operations
Number of employees impacted										80
Transaction costs of disposition						$ 19,000,000		$ 69,800,000
Asset impairment charges								6,200,000
Goodwill, write-off						10,800,000		10,800,000
Inventory write-offs						(6,500,000)		27,000,000
Charge to settle contracts				(179,000)		11,000,000		22,100,000
Lease related charges						1,400,000		1,400,000
Severance and related costs						2,300,000		2,300,000
Sale amount of discontinued operations as per the agreement																	229,400,000
Working capital adjustment which is included in total proceeds																1,000,000
Proceeds from divestiture of businesses											230,400,000
Amount of proceeds related to assets in China																7,200,000
Deferred gain related to the assets in China	5,400,000		5,400,000		5,400,000											5,400,000
Restricted cash	22,901,000		22,901,000		76,115,000											22,900,000
Restriction period on use of proceeds which are held in escrow (in years)																1
Net sales		31,880,000		94,114,000					2,103,000				31,880,000		92,011,000
Cost of sales	(6,449,000)	18,158,000	30,904,000	53,205,000		(6,449,000)	1,901,000	30,904,000	5,383,000				16,257,000		47,822,000
Gross profit	6,449,000	13,722,000	(30,904,000)	40,909,000		6,449,000	(1,901,000)	(30,904,000)	(3,280,000)				15,623,000		44,189,000
Total operating expenses	30,288,000	24,553,000	60,670,000	53,724,000		29,736,000	4,619,000	59,224,000	13,081,000			552,000	19,934,000	1,446,000	40,643,000
Operating (loss) income	(23,839,000)	(10,831,000)	(91,574,000)	(12,815,000)		(23,287,000)	(6,520,000)	(90,128,000)	(16,361,000)			(552,000)	(4,311,000)	(1,446,000)	3,546,000
Net (loss) income from discontinued operations, net of tax	$ (16,754,000)	$ (7,524,000)	$ (59,203,000)	$ (9,153,000)		$ (16,366,000)	$ (2,583,000)	$ (58,268,000)	$ (9,894,000)			$ (388,000)	$ (4,941,000)	$ (935,000)	$ 741,000