Veeco Instruments Inc.

Annual Report on Form 10-K for the Year Ended December 31, 2006

Exhibit 21.1 - Subsidiaries of the Registrant

Subsidiary	Jurisdiction of Organization
U.S. Subsidiaries
Veeco Compound Semiconductor Inc.	MN
Veeco Ion Beam Equipment Inc.	DE
Veeco Slider Process Equipment Inc.	CA
Veeco Metrology Inc.	AZ
Veeco Corporate LLC	DE
Foreign Subsidiaries
Nihon Veeco K.K.	Japan
Veeco Asia Pte Ltd	Singapore
Veeco Instruments GmbH	Germany
Veeco Instruments Limited	England
Veeco Instruments S.A.S.	France
Veeco Instruments B.V.	Netherlands
Veeco Korea Inc.	Korea
Veeco Instruments (Shanghai) Co. Ltd.	China
Veeco Taiwan Inc.	Taiwan