Veeco Instruments Inc.
Annual Report on Form 10-K for the Year Ended December 31, 2009
Exhibit 21.1—Subsidiaries of the Registrant

Subsidiary		Jurisdiction of Organization

U.S. Subsidiaries
Veeco APAC Inc.		DE
Veeco Compound Semiconductor Inc.		MN
Veeco Metrology Inc.		AZ
	Veeco Corporate LLC	DE
Veeco Process Equipment Inc.		DE
Foreign Subsidiaries
Nihon Veeco K.K.		Japan
Veeco Asia Pte. Ltd.		Singapore
	Veeco Malaysia Sdn. Bhd.	Malaysia
Veeco Instruments GmbH		Germany
Veeco Instruments Limited		England
Veeco Instruments S.A.S.		France
	Veeco Instruments B.V.	Netherlands
Veeco Instruments (Shanghai) Co. Ltd.		China
Veeco Korea Inc.		Korea
Veeco Taiwan Inc.		Taiwan