EX-21.1 5 a2153643zex-21_1.htm EXHIBIT 21.1

Exhibit 21.1

 

Veeco Instruments Inc.

Annual Report on Form 10-K for the Year Ended December 31, 2004

Subsidiaries of the Registrant

 

Subsidiary

 

Jurisdiction of
Organization

 

 

 

 

 

U.S. Subsidiaries

 

 

 

 

 

 

 

Veeco Compound Semiconductor Inc. (formerly Veeco St. Paul Inc.)

 

MN

 

 

 

 

 

Veeco Ion Beam Equipment Inc.

 

DE

 

 

 

 

 

Veeco Metrology, LLC

 

DE

 

 

 

 

 

Veeco Slider Process Equipment Inc. (formerly Veeco Aii Inc.)

 

CA

 

 

 

 

 

Veeco Tucson Inc.

 

AZ

 

 

 

 

 

Foreign Subsidiaries

 

 

 

 

 

 

 

Nihon Veeco K.K.

 

Japan

 

 

 

 

 

Veeco Asia Pte. Ltd.

 

Singapore

 

 

 

 

 

Veeco Instruments GmbH

 

Germany

 

 

 

 

 

Veeco Instruments Limited

 

England

 

 

 

 

 

Veeco Instruments S.A.S.

 

France

 

 

 

 

 

Veeco Korea Inc.

 

Korea

 

 

 

 

 

Veeco Instruments (Shanghai) Co. Ltd.

 

China

 

 

 

 

 

Veeco Taiwan Inc.

 

Taiwan