EX-23.1 3 a2064686zex-23_1.txt EXHIBIT 23.1 EXHIBIT 23.1 INDEPENDENT AUDITORS' CONSENT We consent to the incorporation by reference in Registration Statements Nos. 33-87394, 33-95422, 33-95424, 333-08981, 333-35009, 333-79469, 333-36348, 333-39156, 333-49476, 333-66574, 333-69554 on Form S-8 of our report dated March 16, 2001 (September 17, 2001 as to the last paragraph of Note 11) appearing in this Amendment No.3 to Current Report on Form 8-K/A of Veeco Instruments Inc. dated November 28, 2001. DELOITTE & TOUCHE LLP Minneapolis, Minnesota November 30, 2001 35