CONCENTRATION OF RISK, Revenues by Geographic Area (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Mar. 31, 2012	Mar. 31, 2011
Revenues by geographic area [Abstract]
United States	$ 1,274	$ 2,002
All foreign locations	11,346	7,599
Revenues by geographic area [Line Items]
Total revenue	12,620	9,601
Concentration Risk [Line Items]
Number of suppliers from which chemical materials were purchased	1	1
South Korea [Member]
Revenues by geographic area [Line Items]
Total revenue	7,393	6,154
Japan [Member]
Revenues by geographic area [Line Items]
Total revenue	2,566	1,116
Taiwan [Member]
Revenues by geographic area [Line Items]
Total revenue	1,257	287
Other foreign locations [Member]
Revenues by geographic area [Line Items]
Total revenue	$ 130	$ 42