Cancellation order received and obligation thereof.

No definition available.

Name:	ivac_CancellationOrderReceivedAndObligationThereof
Namespace Prefix:	ivac_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Notes receivable number of installments.

+ References

No definition available.

+ Details

Name:	ivac_NotesReceivableNumberofInstallments
Namespace Prefix:	ivac_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

- Definition

Revenue From Contract With Customers.

+ References

No definition available.

+ Details

Name:	ivac_RevenueFromContractWithCustomersLineItems
Namespace Prefix:	ivac_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of increase (decrease) in revenue recognized for cumulative catch-up adjustment from change in measure of progress which increases (decreases) right to consideration in exchange for good or service transferred to customer when right is conditioned on something other than passage of time.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 50
-Paragraph 10
-Subparagraph (b)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479806/606-10-50-10

+ Details

Name:	us-gaap_ContractWithCustomerAssetCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 50
-Paragraph 8
-Subparagraph (b)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479806/606-10-50-8

+ Details

Name:	us-gaap_ContractWithCustomerLiabilityRevenueRecognized
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 55
-Paragraph 27
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479777/606-10-55-27

+ Details

Name:	us-gaap_ContractWithCustomerRefundLiabilityCurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount, after deduction of valuation reserves, other allowances, and customer advances received on long-term contracts or programs, of inventory expected to be converted to cash, sold or exchanged within the normal operating cycle.

+ References

No definition available.

+ Details

Name:	us-gaap_InventoryNetOfAllowancesCustomerAdvancesAndProgressBillings
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Description of timing for satisfying performance obligation in contract with customer. Includes, but is not limited to, as services are rendered, and upon shipment, delivery or completion of service.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 50
-Paragraph 12
-Subparagraph (a)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479806/606-10-50-12

+ Details

Name:	us-gaap_RevenuePerformanceObligationDescriptionOfTiming
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of transaction price allocated to performance obligation that has not been recognized as revenue.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Name Accounting Standards Codification
-Section 50
-Paragraph 13
-Subparagraph (a)
-SubTopic 10
-Topic 606
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479806/606-10-50-13

+ Details

Name:	us-gaap_RevenueRemainingPerformanceObligation
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Details

Name:	us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis=us-gaap_UnbilledRevenuesMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_StatementBusinessSegmentsAxis=ivac_ThinfilmEquipmentSegmentMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_BalanceSheetLocationAxis=ivac_DeferredRevenueMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Revenue - Additional Information (Detail)	3 Months Ended
Revenue - Additional Information (Detail)	Mar. 30, 2024 USD ($) Installment	Dec. 30, 2023 USD ($)	Sep. 30, 2023 USD ($)	May 01, 2023 USD ($)
Revenue From Contract With Customers [Line Items]
Number of installments \| Installment	3
Revenue remaining performance obligation	$ 53,100,000
Revenue performance obligation, description of timing	we also refer to as total backlog. We expect to recognize approximately 55.4% of our remaining performance obligations as revenue in 2024 and 44.6% in 2025.
Inventory, Net of Allowances, Customer Advances and Progress Billings			$ 444,000
Received customer advances associated with the cancelled order				$ 19,100,000
Cancellation Order Received And Obligation Thereof		$ 11,400,000		$ 54,600,000
Accounts Receivable, Unbilled
Revenue From Contract With Customers [Line Items]
Change in contract assets	$ 491,000
TFE \| Accounts Receivable, Unbilled
Revenue From Contract With Customers [Line Items]
Change in contract assets	491,000
TFE \| Deferred Revenue
Revenue From Contract With Customers [Line Items]
Contract with customer liability revenue recognized	$ 66,000,000,000