Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001193125-21-169243-index-headers.html | 2021-05-21 16:02:06 | |
| 0001193125-21-169243-index.html | 2021-05-21 16:02:06 | |
| 0001193125-21-169243.txt | 2021-05-21 16:02:06 | |
 0001193125-21-169243-xbrl.zip | 8682 | 2021-05-21 16:02:06 |
| d170430d8k.htm | 46421 | 2021-05-21 16:02:06 |
| d170430d8k_htm.xml | 3263 | 2021-05-21 16:02:06 |
| FilingSummary.xml | 1691 | 2021-05-21 16:02:06 |
| Financial_Report.xlsx | 5668 | 2021-05-21 16:02:06 |
| ivac-20210519.xsd | 3066 | 2021-05-21 16:02:06 |
| ivac-20210519_lab.xml | 17373 | 2021-05-21 16:02:06 |
| ivac-20210519_pre.xml | 10950 | 2021-05-21 16:02:06 |
| MetaLinks.json | 18248 | 2021-05-21 16:02:06 |
| R1.htm | 38604 | 2021-05-21 16:02:06 |
| report.css | 2766 | 2021-05-21 16:02:06 |
| Show.js | 1084 | 2021-05-21 16:02:06 |