Details of Finite-lived Intangible Assets by Segment (Detail) - USD ($) $ in Thousands	Oct. 03, 2015	Jan. 03, 2015
Finite-Lived Intangible Assets [Line Items]
Finite Lived, Gross Carrying Amount	$ 8,387
Accumulated Amortization	(5,061)	$ (4,421)
Finite Lived, Net Carrying Amount	3,326	$ 3,966
Thin-film Equipment Segment
Finite-Lived Intangible Assets [Line Items]
Finite Lived, Gross Carrying Amount	7,172
Accumulated Amortization	(4,196)
Finite Lived, Net Carrying Amount	2,976
Photonics
Finite-Lived Intangible Assets [Line Items]
Finite Lived, Gross Carrying Amount	1,215
Accumulated Amortization	(865)
Finite Lived, Net Carrying Amount	$ 350