Exhibit 21.1

SUBSIDIARIES OF THE REGISTRANT

1.  Intevac Photonics, Inc.

2.  Intevac Pacific Group Holdings Ltd. Pte — Singapore

3.  Lotus Technologies, Inc. — Santa Clara, California

4.  IRPC, Inc. — Santa Clara, California

5.  Solar Implant Technologies, Inc. — California

6.  Intevac Foreign Sales Corporation — Barbados

7.  Intevac Asia Private Limited — Singapore

8.  Intevac Malaysia Sdn Bhd — Malaysia

9.  Intevac Limited — Hong Kong

10.  Intevac (Shenzhen) Co. Ltd. — China

11.  IVAC Co. Ltd. — Korea