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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-018281
Filing Date
2023-05-05
Accepted
2023-05-05 15:31:44
Documents
96
Period of Report
2023-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q mksi-20230331.htm   iXBRL 10-Q 3409154
2 EX-31.1 mksi-ex31_1.htm EX-31 20766
3 EX-31.2 mksi-ex31_2.htm EX-31 20626
4 EX-32.1 mksi-ex32_1.htm EX-32 17619
  Complete submission text file 0000950170-23-018281.txt   15097540

Data Files

Seq Description Document Type Size
5 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT mksi-20230331_def.xml EX-101.DEF 312313
6 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT mksi-20230331_cal.xml EX-101.CAL 70466
7 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT mksi-20230331.xsd EX-101.SCH 86181
8 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT mksi-20230331_pre.xml EX-101.PRE 505256
9 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT mksi-20230331_lab.xml EX-101.LAB 634698
90 EXTRACTED XBRL INSTANCE DOCUMENT mksi-20230331_htm.xml XML 3810557
Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

IRS No.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 23893483
SIC: 3823 Industrial Instruments For Measurement, Display, and Control