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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-14-000008
Filing Date
2014-02-06
Accepted
2014-02-06 16:00:24
Documents
11
Period of Report
2013-12-31

Document Format Files

Seq Description Document Type Size
1 10-Q asys123113-10q.htm 10-Q 663440
2 EXHIBIT asys123113-ex311.htm EX-31.1 14191
3 EXHIBIT asys123113-ex312.htm EX-31.2 14231
4 EXHIBIT asys123113-ex321.htm EX-32.1 7163
5 EXHIBIT asys123113-ex322.htm EX-32.2 7200
  Complete submission text file 0000720500-14-000008.txt   5597147

Data Files

Seq Description Document Type Size
6 XBRL INSTANCE DOCUMENT asys-20131231.xml EX-101.INS 882144
7 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT asys-20131231.xsd EX-101.SCH 28364
8 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT asys-20131231_cal.xml EX-101.CAL 63232
9 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT asys-20131231_def.xml EX-101.DEF 124974
10 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT asys-20131231_lab.xml EX-101.LAB 446191
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT asys-20131231_pre.xml EX-101.PRE 248470
Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

IRS No.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 14580080
SIC: 3559 Special Industry Machinery, NEC