EX-21.1 2 exhibit211.htm SUBSIDIARIES OF REGISTRANT Exhibit 21 (1)

EXHIBIT 21
SUBSIDIARIES OF ULTRATECH, INC.
     The following is a list of Ultratech, Inc.’s subsidiaries including their jurisdiction of incorporation as of December 31, 2012:
 
 
 
Subsidiaries
 
Jurisdiction of incorporation
Ultratech CH
 
Korea
Ultratech International, Inc.
 
State of Delaware, USA
Ultratech GmbH
 
Germany
Ultra-Tech Technologies Israel Ltd.
 
Israel
Ultratech Kabushiki Kaisha
 
Japan
Ultratech Stepper East, Inc.
 
State of Delaware, USA
Surtek, Inc.
 
State of New York, USA
Ultratech Stepper (Thailand) Co. Ltd.
 
Thailand
Ultratech (Shanghai) Co. Ltd.
 
Peoples Republic of China
Ultratech (Singapore) Pte, Ltd.
 
Singapore
Ultratech Corporation
 
State of Nevada, USA
Ultratech Technology Holding B.V. (Netherlands)
 
Netherlands
Ultratech SE Asia PTE Ltd. (Singapore)
 
Singapore