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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-16-009157
Filing Date
2016-11-03
Accepted
2016-11-03 09:45:14
Documents
57
Period of Report
2016-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20160930x10q.htm 10-Q 1582108
2 EX-31.1 acls-20160930ex31146ebea.htm EX-31.1 13372
3 EX-31.2 acls-20160930ex312bf9a7b.htm EX-31.2 13396
4 EX-32.1 acls-20160930ex321851510.htm EX-32.1 6810
5 EX-32.2 acls-20160930ex322fd61a7.htm EX-32.2 6000
  Complete submission text file 0001558370-16-009157.txt   4406943

Data Files

Seq Description Document Type Size
6 EX-101.INS acls-20160930.xml EX-101.INS 744950
7 EX-101.SCH acls-20160930.xsd EX-101.SCH 24381
8 EX-101.CAL acls-20160930_cal.xml EX-101.CAL 49143
9 EX-101.DEF acls-20160930_def.xml EX-101.DEF 70890
10 EX-101.LAB acls-20160930_lab.xml EX-101.LAB 283642
11 EX-101.PRE acls-20160930_pre.xml EX-101.PRE 198028
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 161970407
SIC: 3559 Special Industry Machinery, NEC